Cleaning of defects is a critical and necessary step in generating a zero-defect mask blank, because defects in the substrate become defects in the multilayer, which ruins the mask blank.

This achievement is a critical and necessary step in generating a zero-defect mask blank.

first step in a defect investigation.

Certain defects are necessary for the existence of individuality.

In a true zero-defects approach, there are no unimportant items.

A great deal of work still remains for getting EUV mask blanks ready for manufacturing, but our cleaning methodology has removed another barrier. We are well positioned for the tasks ahead.